Selective Growth by Electron Beam Induced MOCVD for Quantum Microstructures

T. Takahashi; Y. Arakawa; M. Nishioka; T. Ikoma

doi:https://doi.org/10.7567/SSDM.1990.B-4-4

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜 1990年8月24日
Hotel Sendai Plaza, Sendai, Japan

[B-4-4] Selective Growth by Electron Beam Induced MOCVD for Quantum Microstructures

T. Takahashi、Y. Arakawa、M. Nishioka、T. Ikoma (1.Research Center for Aduanced Science and Technology, University of Tokyo、2.Institute of Industrial Science, University of Tokyo)

https://doi.org/10.7567/SSDM.1990.B-4-4

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