HRTEM and Nano-Scale Micro Analysis of the Titanium/Silicon Interfacial Reaction Correlated with Electrical Properties

Shin-ichi OGAWA; Takashi KOUZAKI; Takehito YOSHIDA; Robert SINCLAIR

doi:https://doi.org/10.7567/SSDM.1990.C-10-6

[C-10-6] HRTEM and Nano-Scale Micro Analysis of the Titanium/Silicon Interfacial Reaction Correlated with Electrical Properties

Shin-ichi OGAWA、Takashi KOUZAKI、Takehito YOSHIDA、Robert SINCLAIR (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.、2.Matsushita Technoresearch、3.Dept. of Materials Science & Engineering, Stanford Univ.)

https://doi.org/10.7567/SSDM.1990.C-10-6

1990 International Conference on Solid State Devices and Materials

[C-10-6] HRTEM and Nano-Scale Micro Analysis of the Titanium/Silicon Interfacial Reaction Correlated with Electrical Properties