[C-10-6] HRTEM and Nano-Scale Micro Analysis of the Titanium/Silicon Interfacial Reaction Correlated with Electrical Properties

Shin-ichi OGAWA, Takashi KOUZAKI, Takehito YOSHIDA, Robert SINCLAIR (1.Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd., 2.Matsushita Technoresearch, 3.Dept. of Materials Science & Engineering, Stanford Univ.)

https://doi.org/10.7567/SSDM.1990.C-10-6