[C-2-10] Tantalum Oxide Films Formed by UV Photo-CVD Using Oxygen and Ozone and Its Photo-Chemical Leakage Current Reduction Mechanism

Satoshi TANIMOTO、Masahiro MATSUI、Minoru AOYAGI、Koichi KAMISAKO、Koichi KUROIWA、Yasuo TARUI (1.Department of Electronic Engineering, Tokyo University of Agriculture and Technology)

https://doi.org/10.7567/SSDM.1990.C-2-10