[C-2-10] Tantalum Oxide Films Formed by UV Photo-CVD Using Oxygen and Ozone and Its Photo-Chemical Leakage Current Reduction Mechanism

Satoshi TANIMOTO, Masahiro MATSUI, Minoru AOYAGI, Koichi KAMISAKO, Koichi KUROIWA, Yasuo TARUI (1.Department of Electronic Engineering, Tokyo University of Agriculture and Technology)

https://doi.org/10.7567/SSDM.1990.C-2-10