[C-2-5] Thin Nitrided SiO2 Films for EEPROMs

M. DUTOIT, E. GOIN, N. NOVKOVSKI, I. AIZENBERG, J. MANTHEY, J. SOLO DE ZALDIVAR (1.Swiss Federal Institute of Technology, 2.Faselec)

https://doi.org/10.7567/SSDM.1990.C-2-5