The Japan Society of Applied Physics

[C-2-7] Low Temperature Deposition of High Quality Silicon Oxide Films

Hideo IZAWA, Yutaka NISHI, Masaya OKAMOTO, Hiroshi MORIMOTO, Mitsuo ISHII (1.Giant Electronics Technology Co., 2.Liquid Crystal Laboratories and Liquid Crystal Display Group, Sharp Co.)

https://doi.org/10.7567/SSDM.1990.C-2-7