[C-4-1] Novel Selective Platinum Deposition on VLSI Contact Hole

J. B. Yeh、C. Y. Chang、J. W. Chou、K. F. Huang、M. S. Feng (1.Institute of Electronics, National Chiao Tung University)

https://doi.org/10.7567/SSDM.1990.C-4-1