[C-7-7] Sharp Boron Spikes in Silicon Grown at Reduced Pressures by Fast-Gas-Switching-CVD

A. T. Vink, P. J. Roksnoer, J. W. F. M. Maes, C. J. Vriezema, P. C. Zalm (1.Philips Research Laboratories)

https://doi.org/10.7567/SSDM.1990.C-7-7