[C-7-7] Sharp Boron Spikes in Silicon Grown at Reduced Pressures by Fast-Gas-Switching-CVD A. T. Vink、P. J. Roksnoer、J. W. F. M. Maes、C. J. Vriezema、P. C. Zalm (1.Philips Research Laboratories) https://doi.org/10.7567/SSDM.1990.C-7-7