[C-9-4] Thin Film Effects of Double-Gate Polysilicon MOSFET

T. Hashimoto, T. Mine, T. Yamanaka, N. Hashimoto, A. Shimizu, T. Nishida, Y. Kawamoto (1.Central Research Laboratory, Hitachi Ltd., 2.Hitachi VLSI Engineering Corp.)

https://doi.org/10.7567/SSDM.1990.C-9-4