[C-9-7] Application of FIB for In-Process Mapping of Failed Capacitors of High-Mega-Bit DRAM

H. Ogawa、K. Tamura、K. Matsuyama、M. Fukumoto、H. Iwasaki (1.Semiconductor Research Center, Matsushita Electric Ind. Co,, Ltd.)

https://doi.org/10.7567/SSDM.1990.C-9-7