[C-9-7] Application of FIB for In-Process Mapping of Failed Capacitors of High-Mega-Bit DRAM

H. Ogawa, K. Tamura, K. Matsuyama, M. Fukumoto, H. Iwasaki (1.Semiconductor Research Center, Matsushita Electric Ind. Co,, Ltd.)

https://doi.org/10.7567/SSDM.1990.C-9-7