The Japan Society of Applied Physics

[D-1-4] Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering

M. TONOUCHI, Y. SUN, T. MIYASATO, H. SAKAMA, M. OHMURA (1.Department of Computer Science and Electronics, Kyushu Institute of Technology, 2.Advanced Technology Research Center, NKK Corporation)

https://doi.org/10.7567/SSDM.1990.D-1-4