Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering

M. TONOUCHI; Y. SUN; T. MIYASATO; H. SAKAMA; M. OHMURA

doi:https://doi.org/10.7567/SSDM.1990.D-1-4

[D-1-4] Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering

M. TONOUCHI, Y. SUN, T. MIYASATO, H. SAKAMA, M. OHMURA (1.Department of Computer Science and Electronics, Kyushu Institute of Technology, 2.Advanced Technology Research Center, NKK Corporation)

https://doi.org/10.7567/SSDM.1990.D-1-4

1990 International Conference on Solid State Devices and Materials

[D-1-4] Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering