Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering

M. TONOUCHI; Y. SUN; T. MIYASATO; H. SAKAMA; M. OHMURA

doi:https://doi.org/10.7567/SSDM.1990.D-1-4

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜 1990年8月24日
Hotel Sendai Plaza, Sendai, Japan

[D-1-4] Room-Temperature Synthesis of ZnS:Mn Films by H2 Plasma Chemical Sputtering

M. TONOUCHI、Y. SUN、T. MIYASATO、H. SAKAMA、M. OHMURA (1.Department of Computer Science and Electronics, Kyushu Institute of Technology、2.Advanced Technology Research Center, NKK Corporation)

https://doi.org/10.7567/SSDM.1990.D-1-4

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