[D-1-5] Layer Disordering of ZnSe/ZnS Strained Layer Superlattices by N+ or Li+ Ion-Implantation and Low Temperature Annealing

Toshiya Yokogawa, Tohru Saitoh, Edmund L. Wolak, Tadashi Narusawa (1.Opto-Electronics Research Laboratory, Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.)

https://doi.org/10.7567/SSDM.1990.D-1-5