[D-1-7] N2/H2O: A New Gas Mixture for Deep Groove Ion Beam Etching of Long Wavelength Quaternary Mushroom Type Laser Structures

B. KEMPF, R. GOBEL, H. W. DINGES, H. BURKHARD (1.Deutsche Bundespost TELEK0M Forschungsinstitut beim FTZ)

https://doi.org/10.7567/SSDM.1990.D-1-7