[D-1-7] N2/H2O: A New Gas Mixture for Deep Groove Ion Beam Etching of Long Wavelength Quaternary Mushroom Type Laser Structures

B. KEMPF、R. GOBEL、H. W. DINGES、H. BURKHARD (1.Deutsche Bundespost TELEK0M Forschungsinstitut beim FTZ)

https://doi.org/10.7567/SSDM.1990.D-1-7