[D-2-2] Effect of Arsenic Flux on Desorption of Methylgallium from GaAs Surface in Metal-Organic Molecular Beam Epitaxy Studied by Mass Spectrometry

Yoshimasa Ohki, Yuji Hiratani (1.Optoelectronics Technology Research Laboratory)

https://doi.org/10.7567/SSDM.1990.D-2-2