[LN-D-1] Suppression of Interfacial Mixing in Si/Ge Superlattices by Sb Deposition

K. FUJITA, S. FUKATSU, H. YAGUCHI, T. IGARASHI, Y. SHIRAKI, R. ITO (1.Research Center for Advanced Science and Technology, The University of Tokyo)

https://doi.org/10.7567/SSDM.1990.LN-D-1