[LN-D-11] Photo-Stimulated Evaporation of SiO2 Films by Synchrotron Radiation and Application to Low-Temperature Cleaning of Si(100)

H. Akazawa、Y. Utsumi、J. Takahashi、T. Urisu (1.NTT LSI Laboratories)

https://doi.org/10.7567/SSDM.1990.LN-D-11