[LN-D-18] Coaxial Impact Collision Ion Scattering Spectroscopy System for the in-situ Monitoring of Molecular Beam Epitaxy

N. Sugiyama、A. Hashimoto、M. Tamura (1.Optoelectronics Technology Research Laboratory)

https://doi.org/10.7567/SSDM.1990.LN-D-18