[LN-D-2] The Effects of Nitridation and Re-Oxidation on Drain Leakage Current in n-Channel MOSFETs

S. Fleischer、Z. H. Liu、P. T. Lai、Z. J. Ma、Y. C. Cheng (1.Dept. of Electrical & Electronic Engineering, University of Hong Kong)

https://doi.org/10.7567/SSDM.1990.LN-D-2