Improvement of the Laser-Recrystallized SOI Structure by a New Crystal Growth Mode

D. J. Wouters; T. Ipposhi; K. Sugahara; Y. Inoue; T. Nishimura; Y. Akasaka; H. E. Maes

doi:https://doi.org/10.7567/SSDM.1990.LN-D-4

[LN-D-4] Improvement of the Laser-Recrystallized SOI Structure by a New Crystal Growth Mode

D. J. Wouters, T. Ipposhi, K. Sugahara, Y. Inoue, T. Nishimura, Y. Akasaka, H. E. Maes (1.LSI R&D Lab., Mitsubishi Electric Corp., 2.Interuniversity Micro-Electronics Center (IMEC))

https://doi.org/10.7567/SSDM.1990.LN-D-4

1990 International Conference on Solid State Devices and Materials

[LN-D-4] Improvement of the Laser-Recrystallized SOI Structure by a New Crystal Growth Mode