[LN-D-9] Substrate Orientation and Processing Effects on Strained CaF2/Si Grown by Molecular Beam Epitaxy

C.-C. Cho, H.-Y. Liu, B. E. Gnade, C.-E. Chen (1.Central Research Laboratories, Texas Instruments Inc., 2.SGS Thomson Microelectronics)

https://doi.org/10.7567/SSDM.1990.LN-D-9