[S-D-3] Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si, Au, and Al Substrates

S. SHOGEN、Y. MATSUMI、M. KAWASAKI、I. TOYOSHIMA (1.Research Institute of Applied Electricity and Research Center for Catalysis, Hokkaido University)

https://doi.org/10.7567/SSDM.1990.S-D-3