[S-D-3] Pyrolytic and Photolytic Dissociation of Trimethylgallium on Si, Au, and Al Substrates

S. SHOGEN, Y. MATSUMI, M. KAWASAKI, I. TOYOSHIMA (1.Research Institute of Applied Electricity and Research Center for Catalysis, Hokkaido University)

https://doi.org/10.7567/SSDM.1990.S-D-3