[S-D-4] Quantum-Chemical Study on the Mechanism of Atomic Layer Epitaxy of GaAs Using Arsine and Trimethylgallium

Ryotaro Irie, Noriyuki Murakami (1.Central Research Laboratory, Hitachi, Ltd., 2.Information Systems Works, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1990.S-D-4