[S-E-20] Hydrogen Radical-Annealing of CVD-Produced Amorphous-Silicon Film

Yasutaka Uchida、Hiroshi Kanoh、Osamu Sugiura、Masakiyo Matsumura (1.Dept. of Electronics and Information Science, Nishi-Tokyo Univ.、2.Dept. of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1990.S-E-20