[S-F-2] The Role of Hydrogen, Oxygen and Water in Oxidation of Hydrogen Terminated Silicon Surface

N. Yabumoto、K. Saito、M. Morita、T. Ohmi (1.NTT LSI Laboratories、2.Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1990.S-F-2