[S-F-2] The Role of Hydrogen, Oxygen and Water in Oxidation of Hydrogen Terminated Silicon Surface

N. Yabumoto, K. Saito, M. Morita, T. Ohmi (1.NTT LSI Laboratories, 2.Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1990.S-F-2