[S-F-4] Silicon-Hydrogen Bonds in Native Oxides Formed during Wet Chemical Treatments

Kazuhisa SUGIYAMA, Takayuki IGARASHI, Kazunori MORIKI, Yoshikatsu NAGASAWA, Takayuki AOYAMA, Rinshi SUGINO, Takashi ITO, Takeo HATTORI (1.Musashi Institute of Technology, 2.Toray Research Center Inc., 3.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.1990.S-F-4