[S-F-5] Surface Composition Analysis of HF Vapor Cleaned Silicon by X Ray Photoelectron Spectroscopy

Anne ERMOLIEFF、F. MARTIN、A. AMOUROUX、S. MARTHON、J. F. M WESTENDORP (1.CEA/DTA, Division LETI/D.OPT、2.ASM Microelectronics technology centre)

https://doi.org/10.7567/SSDM.1990.S-F-5