Progressive Technology of Fluoride Chemicals for ULSI Manufacturing

Nobuhiro MIKI; Ichiroh KAWANABE; Tadahiro OHMI

doi:https://doi.org/10.7567/SSDM.1990.S-F-9

1990 International Conference on Solid State Devices and Materials

1990年8月22日〜 1990年8月24日
Hotel Sendai Plaza, Sendai, Japan

[S-F-9] Progressive Technology of Fluoride Chemicals for ULSI Manufacturing

Nobuhiro MIKI、Ichiroh KAWANABE、Tadahiro OHMI (1.The Department of Electronics, Faculty of Engineering, Tohoku University、2.Hashimoto Chemical Co., LTD.)

https://doi.org/10.7567/SSDM.1990.S-F-9

▲