[S-F-9] Progressive Technology of Fluoride Chemicals for ULSI Manufacturing

Nobuhiro MIKI, Ichiroh KAWANABE, Tadahiro OHMI (1.The Department of Electronics, Faculty of Engineering, Tohoku University, 2.Hashimoto Chemical Co., LTD.)

https://doi.org/10.7567/SSDM.1990.S-F-9