The Improvement of CVD-WSix Process by Preheating Method

Takeyasu Saito; Yoshiaki Yuyama; Yasuyuki Egashira; Yukihiro Shimogaki; Katsuro Sugawara; Hiroshi Komiyama

doi:https://doi.org/10.7567/SSDM.1992.D-1-4

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜 1992年8月28日
Tsukuba Center Building, Tsukuba, Japan

[D-1-4] The Improvement of CVD-WSix Process by Preheating Method

Takeyasu Saito、Yoshiaki Yuyama、Yasuyuki Egashira、Yukihiro Shimogaki、Katsuro Sugawara、Hiroshi Komiyama (1.Department of Chemical Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.1992.D-1-4

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