[D-1-4] The Improvement of CVD-WSix Process by Preheating Method

Takeyasu Saito, Yoshiaki Yuyama, Yasuyuki Egashira, Yukihiro Shimogaki, Katsuro Sugawara, Hiroshi Komiyama (1.Department of Chemical Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.1992.D-1-4