[D-1-6] The Suppression of Precipitation in Boro-Phospho-Silicate-Glass Films by Surface Control by Silylation (SCS) Process

Kousaku Yano, Yuka Terai, Sin-ichi Imai, Tetsuya Ueda, Satoshi Ueda, Masayuki Endoh, Noboru Nomura (1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1992.D-1-6