[PA1-6] Critical Parameters for Obtaining Low Particle Densities in an HF-Last Process

J. L. Alay, S. Verhaverbeke, W. Vandervorst, M. Heyns (1.IMECvzw, 2.LCMM, Facultat de Fisica, Universitat de Barcelona)

https://doi.org/10.7567/SSDM.1992.PA1-6