[PA1-8] Characterization of HF-Treated Si Surfaces by Photoluminescence Spectroscopy and Scanning Tunneling Microscopy

Tomohiro KONISHI、Katsuhiro UESUGI、Seiji KAWANO、Takafumi YAO、Hisayoshi OHSHIMA、Hiroyasu ITO、Tadashi HATTORI (1.Department of Electrical Engineering, Hiroshima University、2.Research Laboratories Nippondenso Co., Ltd.)

https://doi.org/10.7567/SSDM.1992.PA1-8