[PA1-8] Characterization of HF-Treated Si Surfaces by Photoluminescence Spectroscopy and Scanning Tunneling Microscopy

Tomohiro KONISHI, Katsuhiro UESUGI, Seiji KAWANO, Takafumi YAO, Hisayoshi OHSHIMA, Hiroyasu ITO, Tadashi HATTORI (1.Department of Electrical Engineering, Hiroshima University, 2.Research Laboratories Nippondenso Co., Ltd.)

https://doi.org/10.7567/SSDM.1992.PA1-8