[PA1-9] Silane Thermal Decomposition Characteristics on Various Si Surface

Tsuyoshi Watanabe, Masakazu Nakamura, Atsushi Ohki, Koji Kawada Shinji Miyoshi, Shinji Takahashi, Michael S. K Chen, Tadahiro Ohmi (1.Department of Electronics, Tohoku University)

https://doi.org/10.7567/SSDM.1992.PA1-9