[PA1-9] Silane Thermal Decomposition Characteristics on Various Si Surface

Tsuyoshi Watanabe、Masakazu Nakamura、Atsushi Ohki、Koji Kawada Shinji Miyoshi、Shinji Takahashi、Michael S. K Chen、Tadahiro Ohmi (1.Department of Electronics, Tohoku University)

https://doi.org/10.7567/SSDM.1992.PA1-9