[PA1-L10] AFM/STM Investigation of pn Junctions Formed by Ion Implantation

Yasuhiro SUGAWARA, Yoshinobu FUKANO, Seizo MORITA Akihiko NAKANO, Tohru IDA (1.Department of Physics, Faculty of Science, Hiroshima University, 2.VLSI Development Laboratories, IC Group, Sharp Corporation)

https://doi.org/10.7567/SSDM.1992.PA1-L10