[PA2-4] Nitrogen Dangling Bonds in Hydrogenated Amorphous Silicon Nitride Thin Films

J. Kanicki、W. L. Warren、E. H. Poindexter (1.IBM Research Division, Thomas J. Watson Research Center、2.Sandia National Laboratories、3.US Army ET&DL)

https://doi.org/10.7567/SSDM.1992.PA2-4