The Japan Society of Applied Physics

[PA2-4] Nitrogen Dangling Bonds in Hydrogenated Amorphous Silicon Nitride Thin Films

J. Kanicki, W. L. Warren, E. H. Poindexter (1.IBM Research Division, Thomas J. Watson Research Center, 2.Sandia National Laboratories, 3.US Army ET&DL)

https://doi.org/10.7567/SSDM.1992.PA2-4