[PC2-2] Broad Area Electron Beam Enhanced Passivation Treatment of Sulfur Surface of GaAs

Y. C. DU, H. WANG, D. C. SUN, F. M. LI (1.Department of Electronic Eng., Tri-beams open Lab and Department of Physics, Fudan University)

https://doi.org/10.7567/SSDM.1992.PC2-2