[PC2-7] Atomic Layer Epitaxy of AlAs Using Trimethylamine-Alane and Tris-Dimethylamino-Arsenic Kazuyuki FUJII、Ikuo SUEMUNE、Masamichi YAMANISHI (1.Faculty of Engineering, Hiroshima University) https://doi.org/10.7567/SSDM.1992.PC2-7
