[PD2-5] Proximity Gettering of Heavy Metals by High Energy Ion Implantation

T. Kuroi, Y. Kawasaki, S. Komori, K. Fukumoto, M. Inuishi, K. Tsukamoto, H. Shinyashiki, T. Shingyoji (1.LSI Laboratory, Mitsubishi Electric Corporation, 2.Central Research Institute, Mitsubishi Materials Corporation)

https://doi.org/10.7567/SSDM.1992.PD2-5